RF MEMS sensitivity to electromagnetic radiation
نویسندگان
چکیده
منابع مشابه
RF MEMS sensitivity to electromagnetic radiation
Silicon dioxide and silicon nitride as well as other insulating materials are used in micro-electro-mechanical systems. However, their tendency for electrostatic charging diminishes the device reliability. The charging effect becomes significant when these devices are subjected to ionizing radiation. The irradiation induced charging depends on the nature of irradiation, the underlying metal lay...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2005
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/10/1/077